Download the detailed program here (pdf)
The seminar will take place in the lecture hall at
BESSY II, Albert-Einstein-Str. 15, 12489 Berlin.
The dinner on Thursday will take place in a building of the former Deutsche Versuchsanstalt für Luftfahrt, DVL (German Laboratory for Aviation) originally built in 1912/1918. It's within walking distance from BESSY II.
| 9:00 | Reception opens |
| 10:00 - 11:20 | EUV Lithography |
| 11:20 - 12:40 | EUV Metrology with Synchrotron Radiation |
| Lunch | |
| 13:40 - 15:20 | EUV and VUV Detectors |
| Coffee | |
| 16:00 - 16:20 | New PTB Instrumentation |
| 16:20 - 18:30 | Lab tour / Poster session |
| 19:00 | Get Together Meeting |
| 9:00 - 11:00 | Scatterometry |
| Coffee / Poster session | |
| 11:40 - 13:20 | Multilayer Coating Technologies |
| Lunch | |
| 14:20 - 16:00 | Laboratory Based Instruments |
| 16:00 | Closing remarks |
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