Download the detailed program here (pdf)
The seminar will take place in the lecture hall at
BESSY II, Albert-Einstein-Str. 15, 12489 Berlin.
The dinner on Thursday will take place in a building of the former Deutsche Versuchsanstalt für Luftfahrt, DVL (German Laboratory for Aviation) originally built in 1912/1918. It's within walking distance from BESSY II.
9:00 | Reception opens |
10:00 - 11:20 | EUV Lithography |
11:20 - 12:40 | EUV Metrology with Synchrotron Radiation |
Lunch | |
13:40 - 15:20 | EUV and VUV Detectors |
Coffee | |
16:00 - 16:20 | New PTB Instrumentation |
16:20 - 18:30 | Lab tour / Poster session |
19:00 | Get Together Meeting |
9:00 - 11:00 | Scatterometry |
Coffee / Poster session | |
11:40 - 13:20 | Multilayer Coating Technologies |
Lunch | |
14:20 - 16:00 | Laboratory Based Instruments |
16:00 | Closing remarks |