Download the detailed program here (pdf)


The seminar will take place in the lecture hall at

BESSY II, Albert-Einstein-Str. 15, 12489 Berlin.

The dinner on Thursday will take place in a building of the former Deutsche Versuchsanstalt für Luftfahrt, DVL (German Laboratory for Aviation) originally built in 1912/1918. It's within walking distance from BESSY II.

Thursday, October 27th

9:00Reception opens
10:00 - 11:20EUV Lithography
11:20 - 12:40EUV Metrology with Synchrotron Radiation
13:40 - 15:20EUV and VUV Detectors
16:00 - 16:20New PTB Instrumentation
16:20 - 18:30Lab tour / Poster session
19:00Get Together Meeting

 Friday, October 28th

9:00 - 11:00Scatterometry
Coffee / Poster session
11:40 - 13:20Multilayer Coating Technologies
14:20 - 16:00Laboratory Based Instruments
16:00Closing remarks